후 열처리에 의한 cubic-BN 상과 hexagonal-BN상 혼합 막의 안정성 향상Stabilization of cubic-BN/hexagonal BN Mixed Films by Post-Annealing
- Publisher
- 한국진공학회
- Issue Date
- 2000-05
- Language
- Korean
- Citation
한국진공학회지, v.9, no.2, pp.155 - 161
- ISSN
- 1225-8822
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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