후 열처리에 의한 cubic-BN 상과 hexagonal-BN상 혼합 막의 안정성 향상Stabilization of cubic-BN/hexagonal BN Mixed Films by Post-Annealing
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박영준 | ko |
| dc.contributor.author | 최제형 | ko |
| dc.contributor.author | 이정용 | ko |
| dc.contributor.author | 백영준 | ko |
| dc.date.accessioned | 2013-03-02T13:52:48Z | - |
| dc.date.available | 2013-03-02T13:52:48Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2000-05 | - |
| dc.identifier.citation | 한국진공학회지, v.9, no.2, pp.155 - 161 | - |
| dc.identifier.issn | 1225-8822 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/73837 | - |
| dc.language | Korean | - |
| dc.publisher | 한국진공학회 | - |
| dc.title | 후 열처리에 의한 cubic-BN 상과 hexagonal-BN상 혼합 막의 안정성 향상 | - |
| dc.title.alternative | Stabilization of cubic-BN/hexagonal BN Mixed Films by Post-Annealing | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 9 | - |
| dc.citation.issue | 2 | - |
| dc.citation.beginningpage | 155 | - |
| dc.citation.endingpage | 161 | - |
| dc.citation.publicationname | 한국진공학회지 | - |
| dc.contributor.localauthor | 이정용 | - |
| dc.contributor.nonIdAuthor | 박영준 | - |
| dc.contributor.nonIdAuthor | 최제형 | - |
| dc.contributor.nonIdAuthor | 백영준 | - |
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