PVD 방법에 의한 TiN barrier metal 형성과 공정개발Process Technology and the Formation of the TiN Barrier Metal By Physical Vapor Deposition
- Publisher
- 한국진공학회
- Issue Date
- 1997-12
- Language
- Korean
- Citation
한국진공학회지, v.6, no.3, pp.255 - 262
- ISSN
- 1225-8822
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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