PVD 방법에 의한 TiN barrier metal 형성과 공정개발Process Technology and the Formation of the TiN Barrier Metal By Physical Vapor Deposition
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 최치규 | ko |
| dc.contributor.author | 강민성 | ko |
| dc.contributor.author | 박형호 | ko |
| dc.contributor.author | 염병렬 | ko |
| dc.contributor.author | 서경수 | ko |
| dc.contributor.author | 이종덕 | ko |
| dc.contributor.author | 김건호 | ko |
| dc.contributor.author | 이정용 | ko |
| dc.date.accessioned | 2013-03-02T13:30:58Z | - |
| dc.date.available | 2013-03-02T13:30:58Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1997-12 | - |
| dc.identifier.citation | 한국진공학회지, v.6, no.3, pp.255 - 262 | - |
| dc.identifier.issn | 1225-8822 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/73746 | - |
| dc.language | Korean | - |
| dc.publisher | 한국진공학회 | - |
| dc.title | PVD 방법에 의한 TiN barrier metal 형성과 공정개발 | - |
| dc.title.alternative | Process Technology and the Formation of the TiN Barrier Metal By Physical Vapor Deposition | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 6 | - |
| dc.citation.issue | 3 | - |
| dc.citation.beginningpage | 255 | - |
| dc.citation.endingpage | 262 | - |
| dc.citation.publicationname | 한국진공학회지 | - |
| dc.contributor.localauthor | 이정용 | - |
| dc.contributor.nonIdAuthor | 최치규 | - |
| dc.contributor.nonIdAuthor | 강민성 | - |
| dc.contributor.nonIdAuthor | 박형호 | - |
| dc.contributor.nonIdAuthor | 염병렬 | - |
| dc.contributor.nonIdAuthor | 서경수 | - |
| dc.contributor.nonIdAuthor | 이종덕 | - |
| dc.contributor.nonIdAuthor | 김건호 | - |
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