Synthesis of fault-tolerant supervisor for automated manufacturing systems: A case study on photolithographic process

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In this paper, a discrete event dynamic system (DEDS) approach is utilized to improve the reliability of a system from the fault-tolerance viewpoint. We propose a systematic way to classify faults and failures quantitatively and to find tolerable fault event sequences embedded in DEDS's. After this, the synthesis of a fault-tolerant supervisory control system is investigated. A case study of a photolithographic process in a semiconductor manufacturing system is provided to illustrate these techniques.
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
1998-04
Language
English
Article Type
Article
Keywords

DISCRETE-EVENT SYSTEMS

Citation

IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION, v.14, no.2, pp.348 - 351

ISSN
1042-296X
URI
http://hdl.handle.net/10203/72013
Appears in Collection
BiS-Journal Papers(저널논문)EE-Journal Papers(저널논문)
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