DC Field | Value | Language |
---|---|---|
dc.contributor.author | Cho, Kwang-Hyun | ko |
dc.contributor.author | Lim, Jong-Tae | ko |
dc.date.accessioned | 2013-02-28T01:25:11Z | - |
dc.date.available | 2013-02-28T01:25:11Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1998-04 | - |
dc.identifier.citation | IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION, v.14, no.2, pp.348 - 351 | - |
dc.identifier.issn | 1042-296X | - |
dc.identifier.uri | http://hdl.handle.net/10203/72013 | - |
dc.description.abstract | In this paper, a discrete event dynamic system (DEDS) approach is utilized to improve the reliability of a system from the fault-tolerance viewpoint. We propose a systematic way to classify faults and failures quantitatively and to find tolerable fault event sequences embedded in DEDS's. After this, the synthesis of a fault-tolerant supervisory control system is investigated. A case study of a photolithographic process in a semiconductor manufacturing system is provided to illustrate these techniques. | - |
dc.language | English | - |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
dc.subject | DISCRETE-EVENT SYSTEMS | - |
dc.title | Synthesis of fault-tolerant supervisor for automated manufacturing systems: A case study on photolithographic process | - |
dc.type | Article | - |
dc.identifier.wosid | 000072855600016 | - |
dc.identifier.scopusid | 2-s2.0-0032048390 | - |
dc.type.rims | ART | - |
dc.citation.volume | 14 | - |
dc.citation.issue | 2 | - |
dc.citation.beginningpage | 348 | - |
dc.citation.endingpage | 351 | - |
dc.citation.publicationname | IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION | - |
dc.contributor.localauthor | Cho, Kwang-Hyun | - |
dc.contributor.localauthor | Lim, Jong-Tae | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | discrete event dynamic systems | - |
dc.subject.keywordAuthor | fault-tolerance | - |
dc.subject.keywordAuthor | photolithographic process | - |
dc.subject.keywordAuthor | supervisor | - |
dc.subject.keywordPlus | DISCRETE-EVENT SYSTEMS | - |
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