ECR - PECVD PZT 박막의 전기적 특성에 대한 전극의 영향Effects of electrode on the electric properties of PZT films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition
- Publisher
- 대한금속·재료학회
- Issue Date
- 1998-04
- Language
- Korean
- Citation
대한금속학회회보 , v.11, no.5, pp.538 - 545
- ISSN
- 1738-8228
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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