ECR - PECVD PZT 박막의 전기적 특성에 대한 전극의 영향Effects of electrode on the electric properties of PZT films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이원종 | ko |
| dc.date.accessioned | 2013-02-27T18:38:01Z | - |
| dc.date.available | 2013-02-27T18:38:01Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1998-04 | - |
| dc.identifier.citation | 대한금속학회회보 , v.11, no.5, pp.538 - 545 | - |
| dc.identifier.issn | 1738-8228 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/70148 | - |
| dc.language | Korean | - |
| dc.publisher | 대한금속·재료학회 | - |
| dc.title | ECR - PECVD PZT 박막의 전기적 특성에 대한 전극의 영향 | - |
| dc.title.alternative | Effects of electrode on the electric properties of PZT films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 11 | - |
| dc.citation.issue | 5 | - |
| dc.citation.beginningpage | 538 | - |
| dc.citation.endingpage | 545 | - |
| dc.citation.publicationname | 대한금속학회회보 | - |
| dc.contributor.localauthor | 이원종 | - |
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