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Analysis of Backward Sequence for Single-Armed Cluster Tools With Processing Time Variations Lee, Jun-Ho; Kim, Jun-Ho, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.17, no.4, pp.2167 - 2174, 2020-10 |
Feedback Control of Cluster Tools: Stability Against Random Time Disruptions Kim, Chulhan; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.19, no.3, pp.2008 - 2015, 2022-07 |
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