Feedback Control of Cluster Tools: Stability Against Random Time Disruptions

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In this research, we examine feedback control-based cluster tool scheduling methods to maintain consistent wafer sojourn times when a tool is subject to random disruptive events. In our previous work, we proposed a feedback control design that regulates wafer sojourn times not to exceed the upper limits on wafer delays in a deterministic processing environment. Although such a feedback controller may ensure that wafer delay upper limits are always satisfied, it does not necessarily guarantee that the tool always restores its initial tool state after the occurrence of time disruptive events. This article thus further examines under which conditions a feedback controller enforces the wafer sojourn times to be stabilized in a stochastic processing environment with unexpected random time disruptions.
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
2022-07
Language
English
Article Type
Article
Citation

IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.19, no.3, pp.2008 - 2015

ISSN
1545-5955
DOI
10.1109/TASE.2021.3070346
URI
http://hdl.handle.net/10203/297607
Appears in Collection
IE-Journal Papers(저널논문)
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