Showing results 1 to 2 of 2
Self-assembled silicon membrane resonator for high vacuum pressure sensing Kim, Taeyeong; Ko, Juhee; Lee, Jungchul, VACUUM, v.201, 2022-07 |
Surrogate model for optimizing annealing duration of self-assembled membrane-cavity structures Jeong, Mun Goung; Kim, Taeyeong; Lee, Bong Jae; Lee, Jungchul, MICRO AND NANO SYSTEMS LETTERS, v.10, no.1, 2022-06 |
Discover