3MeV P+ 이온주입된 실리콘의 열처리에 따른 X-ray Rocking Curve 분석X-ray Rocking Curve Analyses of Post-annealed 3 MeV P+ Implanted Silicon
- Publisher
- 한국진공학회
- Issue Date
- 1995-03
- Language
- Korean
- Citation
한국진공학회지, v.4, no.1, pp.109 - 117
- ISSN
- 1225-8822
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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