Studies on the Nucleation and Growth of Chemical-Vapor-Deposited W on TiN Substrateds
- Publisher
- JME
- Issue Date
- 1993
- Language
- English
- Citation
JOURNAL OF MATERIALS SCIENCE AND ENGINEERING, v.17, pp.137 - 142
- Appears in Collection
- RIMS Journal Papers
- Files in This Item
- There are no files associated with this item.
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