Studies on the Nucleation and Growth of Chemical-Vapor-Deposited W on TiN Substrateds
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | E.S.Kim | ko |
| dc.contributor.author | C.M.Lee | ko |
| dc.contributor.author | Lim, Ho Bin | ko |
| dc.date.accessioned | 2013-02-25T17:58:25Z | - |
| dc.date.available | 2013-02-25T17:58:25Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1993 | - |
| dc.identifier.citation | JOURNAL OF MATERIALS SCIENCE AND ENGINEERING, v.17, pp.137 - 142 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/64130 | - |
| dc.language | English | - |
| dc.publisher | JME | - |
| dc.title | Studies on the Nucleation and Growth of Chemical-Vapor-Deposited W on TiN Substrateds | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 17 | - |
| dc.citation.beginningpage | 137 | - |
| dc.citation.endingpage | 142 | - |
| dc.citation.publicationname | JOURNAL OF MATERIALS SCIENCE AND ENGINEERING | - |
| dc.contributor.localauthor | Lim, Ho Bin | - |
| dc.contributor.nonIdAuthor | E.S.Kim | - |
| dc.contributor.nonIdAuthor | C.M.Lee | - |
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