대향 타겟트 스파터기에서 반응성 플라즈마의 스펙트로스코프 검진Spetroscopic Diagnostics of Reactive Plasma in a Facing Target Sputtering Unit
- Publisher
- 한국재료학회
- Issue Date
- 1992-10
- Language
- Korean
- Citation
한국재료학회지, v.2, no.5, pp.337 - 342
- ISSN
- 1225-0562
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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