대향 타겟트 스파터기에서 반응성 플라즈마의 스펙트로스코프 검진Spetroscopic Diagnostics of Reactive Plasma in a Facing Target Sputtering Unit
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이택동 | ko |
| dc.contributor.author | 나종갑 | ko |
| dc.contributor.author | 박순자 | ko |
| dc.date.accessioned | 2013-02-25T14:34:31Z | - |
| dc.date.available | 2013-02-25T14:34:31Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1992-10 | - |
| dc.identifier.citation | 한국재료학회지, v.2, no.5, pp.337 - 342 | - |
| dc.identifier.issn | 1225-0562 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/62888 | - |
| dc.language | Korean | - |
| dc.publisher | 한국재료학회 | - |
| dc.title | 대향 타겟트 스파터기에서 반응성 플라즈마의 스펙트로스코프 검진 | - |
| dc.title.alternative | Spetroscopic Diagnostics of Reactive Plasma in a Facing Target Sputtering Unit | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 2 | - |
| dc.citation.issue | 5 | - |
| dc.citation.beginningpage | 337 | - |
| dc.citation.endingpage | 342 | - |
| dc.citation.publicationname | 한국재료학회지 | - |
| dc.contributor.localauthor | 이택동 | - |
| dc.contributor.nonIdAuthor | 나종갑 | - |
| dc.contributor.nonIdAuthor | 박순자 | - |
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.