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College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Journal Papers(저널논문)

MONTE-CARLO SIMULATION OF ENERGY-DISSIPATION IN ELECTRON-BEAM LITHOGRAPHY INCLUDING SECONDARY-ELECTRON GENERATION

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LEE, KY / CHO, GS / Choi, Duk In
Publisher
AMER INST PHYSICS
Issue Date
1990-06
Language
English
Article Type
Article
Citation

JOURNAL OF APPLIED PHYSICS, v.67, no.12, pp.7560 - 7567

ISSN
0021-8979
DOI
10.1063/1.345820
URI
http://hdl.handle.net/10203/62792
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