MONTE-CARLO SIMULATION OF ENERGY-DISSIPATION IN ELECTRON-BEAM LITHOGRAPHY INCLUDING SECONDARY-ELECTRON GENERATION
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | LEE, KY | ko |
| dc.contributor.author | CHO, GS | ko |
| dc.contributor.author | Choi, Duk In | ko |
| dc.date.accessioned | 2013-02-25T14:19:20Z | - |
| dc.date.available | 2013-02-25T14:19:20Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1990-06 | - |
| dc.identifier.citation | JOURNAL OF APPLIED PHYSICS, v.67, no.12, pp.7560 - 7567 | - |
| dc.identifier.issn | 0021-8979 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/62792 | - |
| dc.language | English | - |
| dc.publisher | AMER INST PHYSICS | - |
| dc.title | MONTE-CARLO SIMULATION OF ENERGY-DISSIPATION IN ELECTRON-BEAM LITHOGRAPHY INCLUDING SECONDARY-ELECTRON GENERATION | - |
| dc.type | Article | - |
| dc.identifier.wosid | A1990DF23900054 | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 67 | - |
| dc.citation.issue | 12 | - |
| dc.citation.beginningpage | 7560 | - |
| dc.citation.endingpage | 7567 | - |
| dc.citation.publicationname | JOURNAL OF APPLIED PHYSICS | - |
| dc.identifier.doi | 10.1063/1.345820 | - |
| dc.contributor.nonIdAuthor | LEE, KY | - |
| dc.contributor.nonIdAuthor | CHO, GS | - |
| dc.type.journalArticle | Article | - |
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