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Results 1-4 of 4 (Search time: 0.003 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Subsurface Imaging of Microfabricated Silicon Membrane-Cavity Structures Using Near-Infrared Interferometry

Jeong, Mun Goung; Kim, Taeyeong; Lee, Bong Jae; Lee, Jungchul, ADVANCED ENGINEERING MATERIALS, v.24, no.10, 2022-10

2
PCA-based sub-surface structure and defect analysis for germanium-on-nothing using nanoscale surface topography

Jeong, Jaewoo; Kim, Taeyeong; Lee, Bong Jae; Lee, Jungchul, SCIENTIFIC REPORTS, v.12, no.1, 2022-05

3
Surrogate model for optimizing annealing duration of self-assembled membrane-cavity structures

Jeong, Mun Goung; Kim, Taeyeong; Lee, Bong Jae; Lee, Jungchul, MICRO AND NANO SYSTEMS LETTERS, v.10, no.1, 2022-06

4
JMEMS Letters Thick Germanium-on-Nothing Structures by Annealing Microscale Hole Arrays With Straight Sidewall Profiles

Jeong, Mun Goung; Kim, Taeyeong; Lee, Bong Jae; Lee, Jungchul, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.31, no.2, pp.183 - 185, 2022-04

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