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An isotropic suspension system for a biaxial accelerometer using electroplated thick metal with a HAR SU-8 mold Lee, Jin Seung; Lee, Seung Seob, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.18, no.2, 2008-02 |
Fabrication of a freestanding micro mechanical structure using electroplated thick metal with a HAR SU-8 mold Lee, Jin Seung; Lee, Seung Seob, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, v.15, no.2, pp.287 - 296, 2009-02 |
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