An isotropic suspension system for a biaxial accelerometer using electroplated thick metal with a HAR SU-8 mold

Abstract

In this paper, a novel approach is developed to design an isotropic suspension system using thick metal freestanding micro-structures combining bulk micro-machining with electroplating based on a HAR SU-8 mold. An omega-shape isotropic suspension system composed of circular curved beams that have free switching of imaginary boundary conditions is proposed. This novel isotropic suspension design is not affected by geometric dimensional parameters and always achieves matching stiffness along the principle axes of elasticity. Using the finite element method, the isotropic suspension system was compared with an S-shaped meandering suspension system. In order to realize the suggested isotropic suspension system, a cost-effective fabrication process using electroplating with the SU-8 mold was developed to avoid expensive equipment and materials such as deep reactive-ion etching (DRIE) or a silicon-on-insulator (SOI) wafer. The fabricated isotropic suspension system was verified by electromagnetic actuation experiments. Finally, a biaxial accelerometer with isotropic suspension system was realized and tested using a vibration generator system. The proposed isotropic suspension system and the modified surface micro-machining technique based on electroplating with an SU-8 mold can contribute towards minimizing the system size, simplifying the system configuration, reducing the system price of and facilitating mass production of various types of low-cost sensors and actuators.