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Results 51-60 of 75 (Search time: 0.004 seconds).
| NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
|---|---|
| Electron temperature analysis of two-gas-species inductively coupled plasma Bai, KH; Chang, Hong-Young; Uhm, HS, APPLIED PHYSICS LETTERS, v.79, no.11, pp.1596 - 1598, 2001-09 | |
| Cleaning of wafer edge, bevel and back-side with a torus-shaped capacitively coupled plasma Jeon, B; Chang, Hong-Young; Song, JK; Jeon, CW, PLASMA SOURCES SCIENCE TECHNOLOGY, v.11, no.4, pp.520 - 524, 2002-11 | |
| A study on the formation and characteristics of the Si-O-C-H composite thin films with low dielectric constant for advanced semiconductor devices Yang, CS; Oh, KS; Ryu, JY; Kim, DC; Shou-Yong, J; Choi, CK; Lee, HJ; Um, SH; Chang, Hong-Young, THIN SOLID FILMS, v.390, no.1-2, pp.113 - 118, 2001-06 | |
| Dispersion relation in plasmas generated by a sheath-helix antenna Uhm, HS; Uhm, SH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.91, no.3, pp.1031 - 1039, 2002-02 | |
| Power dissipation mode transition by a magnetic field You, SJ; Chung, CW; Bai, KH; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.81, no.14, pp.2529 - 2531, 2002-09 | |
| Effects of substrate bias on electron energy distribution in magnetron sputtering system Seo, Sang-Hun; In, Jung-Hwan; Chang, Hong-Young; Han, Jeon-Geon, PHYSICS OF PLASMAS, v.11, no.10, pp.4796 - 4800, 2004-10 | |
| Plasma parameters analysis of various mixed gas inductively coupled plasmas Bai, KH; You, SJ; Chang, Hong-Young; Uhm, HS, PHYSICS OF PLASMAS, v.9, no.6, pp.2831 - 2838, 2002-06 | |
| Heating-mode transition in the capacitive mode of inductively coupled plasmas Chung, CW; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.80, no.10, pp.1725 - 1727, 2002-03 | |
| The effects of mixing molecular gases on plasma parameters in a system with a grid-controlled electron temperature Bai, KH; Hong, JI; You, SJ; Choi, CK; Chang, Hong-Young, PHYSICS OF PLASMAS, v.9, no.3, pp.1025 - 1028, 2002-03 | |
| The KSTAR project: An advanced steady state superconducting tokamak experiment Lee, GS; Kim, J; Hwang, SM; Chang, Choong-Seock; Chang, Hong-Young; Cho, MH; Choi, BH; Kim, K; Cho, KW; Cho, S; Choh, KK; Choi, CH; Choi, JH; Choi, JW; Choi, IS; Do, CJ; Ha, TH; Han, JH; Hong, JS; Hong, KH; Hur, NI; Hwang, IS; Im, KH; Jhang, HG; Jung, YS; Kim, BC; Kim, DL; Kim, GH; Kim, HS; Kim, JS; Kim, JY; Kim, WC; Kim, YS; Kwon, KH; Kyum, MC; Lee, BJ; Lee, DK; Lee, HG; Lee, JM; Lee, SG; Na, HG; Oh, YK; Park, JH; Ri, HC; Ryoo, YS; Song, KY; Yang, HL; Yang, JG; Yoo, BJ; Yoo, SJ; Yoon, NS; Yoon, SB; You, GH; You, KI; Choe, Wonho; Choi, Duk In; Jeong, Sangkwon; Lee, DY; Bae, YS; Kang, HS; Kim, GN; Namkung, W; Oh, JS; Bae, YD; Cho, YS; Hong, BG; Hong, G; Hwang, CK; In, SR; Ju, MH; Lee, HJ; Oh, BH; Yoon, BJ; Baang, S; Choi, HJ; Hwang, J; Kim, MG; Kim, YJ; Lee, SI; Yee, J; Yoon, CS; Chung, KH; Hong, SH; Hwang, YS; Kim, SH; Kim, YH; Chung, KH; Lim, JY; Ha, DW; Oh, SS; Ryu, KS; Wang, QL; Ko, TK; Joo, J; Suh, S; Choi, CH; Lee, JH; Lee, YW; Shin, HS; Song, IH; Baek, J; Han, IY; Koh, Y; Park, PY; Ryu, C; Cho, JJ; Hwang, DM; Kim, YS; Schmidt, JA; Park, HK; Neilson, GH; Reiersen, WT; Simmons, RT; Bernabei, S; Dahlgren, F; Grisham, LR; Jardin, SC; Kessel, CE; Manickam, J; Medley, SS; Pomphrey, N; Sinnis, JC; Brown, TG; White, RB; Young, KM; Schultz, J; Wang, PW; Sevier, L; Carter, MD; Ryan, PM; Swain, DW; Hill, DN; Nevins, WM; Braams, BJ, NUCLEAR FUSION, v.40, pp.575 - 582, 2000-03 |