Power dissipation mode transition by a magnetic field

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We measured electrical characteristics of transversely magnetized capacitively coupled plasma at low pressure (10 mTorr). From these measurements, we found that the power characteristics of the magnetized discharge were different from those of the unmagnetized discharge. As the magnetic field increases, a square dependence of power characteristic at high current changes to a linear dependence. This can be understood as a power dissipation mode transition by a magnetic field. A calculation from a simple sheath model agrees well with the experimental data. (C) 2002 American Institute of Physics.
Publisher
AMER INST PHYSICS
Issue Date
2002-09
Language
English
Article Type
Article
Keywords

DISCHARGE

Citation

APPLIED PHYSICS LETTERS, v.81, no.14, pp.2529 - 2531

ISSN
0003-6951
DOI
10.1063/1.1506944
URI
http://hdl.handle.net/10203/84003
Appears in Collection
PH-Journal Papers(저널논문)
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