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Results 21-30 of 75 (Search time: 0.008 seconds).
| NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
|---|---|
| Proceedings of the international symposium on dry process - DPS 2005 Fujiwara, Nobuo; Stamate, Eugen; Yeom, Geun-Young; Shiratani, Masaharu; Chang, Hong-Young; Economou, Demetre J.; Kusano, Eiji; Chang, Jane P., THIN SOLID FILMS, v.515, no.12, pp.4843 - 4845, 2007-04 | |
| Highly selective SiO2 etching in low-electron-temperature inductively coupled plasma Bai, KH; Chang, Hong-Young; Kwon, GC; Kim, HS; Kim, JS, JAPANESE JOURNAL OF APPLIED PHYSICS, v.46, pp.3602 - 3604, 2007-06 | |
| Photodissociation effects on the electron density and on FTIR measurements in a BTMSM/Ar discharge Jung, WB; Jang, YJ; Choi, CK; Chang, Hong-Young, JOURNAL OF PHYSICS D-APPLIED PHYSICS, v.40, pp.4164 - 4167, 2007-07 | |
| Electron drift and the loss balance of charged particles in planar-unbalanced dc magnetron discharge Seo, SH; In, JH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.97, pp.335 - 347, 2005-01 | |
| Control of negative ion density in SF6/Ar capacitive discharges You, SJ; Kim, SS; Chang, Hong-Young, PHYSICS OF PLASMAS, v.12, pp.317 - 324, 2005-08 | |
| Control of electron density and temperature with a modified capacitive discharge You, SJ; Bai, KH; Chae, SH; Chang, Hong-Young, PLASMA CHEMISTRY AND PLASMA PROCESSING, v.25, pp.245 - 254, 2005-06 | |
| Efficient electron heating in short-pulsed magnetron discharges Seo, SH; In, JH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.98, pp.1765 - 1773, 2005-10 | |
| Experimental investigation of plasma dynamics in dc and short-pulse magnetron discharges Seo, SH; In, JH; Chang, Hong-Young, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.15, pp.256 - 265, 2006-05 | |
| Time evolution of electron energy distribution function and plasma parameters in pulsed and unbalanced magnetron argon discharge Seo, SH; In, JH; Chang, Hong-Young; Han, JG, JOURNAL OF APPLIED PHYSICS, v.98, pp.8471 - 8477, 2005-08 | |
| Characterization of pulsed plasma in unbalanced magnetron argon discharge Lee, SW; Seo, SH; In, JH; Chung, CW; Chang, Hong-Young, PHYSICS OF PLASMAS, v.12, pp.297 - 301, 2005-06 |