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Results 1-3 of 3 (Search time: 0.004 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Characteristics of the Deposition Rate per Unit Power on Pulsed-DC Magnetron Sputtering Source

An, Sang-Hyuk; In, Jung-Hwan; Chang, Hong-Young, PLASMA PROCESSES AND POLYMERS, v.6, no.12, pp.855 - 859, 2009-12

2
Role of low-frequency power in dual-frequency capacitive discharges

Ahn, Seung Kyu; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.95, no.11, 2009-09

3
Three-step decay of the plasma density near the substrate in pulsed-dc magnetron sputtering discharge

In, Jung Hwan; Na, Byung Keun; Seo, SH; Chang, Hong-Young; Han, JG, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.18, 2009-11

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