Browse "PH-Journal Papers(저널논문)" by Author Ichiki,Takanori
Showing results 1 to 1 of 1
| A new inside-type segmented coil antenna for uniformity control in a large-area inductively coupled plasma Lee, Pyung-Woo; Kim, Sung-Sik; Seo, Sang-Hun; Chang, Choong-Seock; Chang, Hongyoung; Ichiki,Takanori; Horiike,Yasuhiro, JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.39, no.6A, pp.548 - 550, 2000-06 |
Discover
Type
- 5,699 Article
Open Access
- 509 OA Article
Date issued
- 792 2020 - 2024
- 1,976 2010 - 2019
- 1,595 2000 - 2009
- 975 1990 - 1999
- 340 1980 - 1989