A new inside-type segmented coil antenna for uniformity control in a large-area inductively coupled plasma

Cited 7 time in webofscience Cited 7 time in scopus
  • Hit : 350
  • Download : 0
It is found that a properly tuned segmented coil system allows external control of the radial plasma density profile in an inside-type, large-area inductively coupled plasma. This coil system is composed of inner and outer coil segments and an external variable inductor. he external variable inductor is used to balance coil currents between the two coil segments for plasma uniformity control. The measured results indicate that radial plasma spread can be controlled and optimized with this external variable inductor.
Publisher
JAPAN J APPLIED PHYSICS
Issue Date
2000-06
Language
English
Article Type
Article
Keywords

FREQUENCY PLASMA; DISCHARGE

Citation

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.39, no.6A, pp.548 - 550

ISSN
0021-4922
DOI
10.1143/JJAP.39.L548
URI
http://hdl.handle.net/10203/76166
Appears in Collection
PH-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 7 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0