Browse "PH-Journal Papers(저널논문)" by Author Chung, CW

Showing results 1 to 16 of 16

1
Characterization of pulsed plasma in unbalanced magnetron argon discharge

Lee, SW; Seo, SH; In, JH; Chung, CW; Chang, Hong-Young, PHYSICS OF PLASMAS, v.12, pp.297 - 301, 2005-06

2
Development of a dual inductively coupled plasma source for direct and remote plasma generation in a reactor

Uhm, S; Lee, KH; Chang, Hong-Young; Chung, CW, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS REVIEW PAPERS, v.44, no.2, pp.1081 - 1085, 2005-02

3
Electron cyclotron resonance in a weakly magnetized radio-frequency inductive discharge

Chung, CW; Kim, SS; Chang, Hong-Young, PHYSICAL REVIEW LETTERS, v.88, no.9, 2002-03

4
Experimental measurement of the electron energy distribution function in the radio frequency electron cyclotron resonance inductive discharge

Chung, CW; Kim, SS; Chang, Hong-Young, PHYSICAL REVIEW E, v.69, pp.97 - 102, 2004-01

5
Feature of electron energy distribution in a low-pressure capacitive discharge

You, SJ; Chung, CW; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.87, pp.3751 - 3762, 2005-07

6
Heating-mode transition in the capacitive mode of inductively coupled plasmas

Chung, CW; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.80, no.10, pp.1725 - 1727, 2002-03

7
Mode transition for power dissipation induced by driving frequency in capacitively coupled plasma

You, SJ; Kim, HC; Chung, CW; Chang, Hong-Young; Lee, JK, JOURNAL OF APPLIED PHYSICS, v.94, pp.7422 - 7426, 2003-12

8
Nonlocal electron kinetics in a planar inductive helium discharge

Seo, SH; Chung, CW; Hong, JI; Chang, Hong-Young, PHYSICAL REVIEW E, v.62, no.5, pp.7155 - 7167, 2000-11

9
On a dual inductively coupled plasma for direct and remote plasma in a reactor

Uhm, S; Lee, KH; Chang, Hong-Young; Chung, CW, PHYSICS OF PLASMAS, v.11, pp.4830 - 4836, 2004-10

10
On inductively coupled plasmas for next-generation processing

Lee, YK; Lee, DS; Bai, KH; Chung, CW; Chang, Hong-Young, SURFACE COATINGS TECHNOLOGY, v.169, pp.20 - 23, 2003-06

11
Power dissipation mode transition by a magnetic field

You, SJ; Chung, CW; Bai, KH; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.81, no.14, pp.2529 - 2531, 2002-09

12
Pressure and helium mixing effects on plasma parameters in temperature control using a grid system

Bai, KH; Hong, JI; Chung, CW; Kim, SS; Chang, Hong-Young, PHYSICS OF PLASMAS, v.8, no.7, pp.3498 - 3501, 2001-07

13
Review of heating mechanism in inductively coupled plasma

Seo, SH; Chung, CW; Chang, Hong-Young, SURFACE COATINGS TECHNOLOGY, v.131, no.1-3, pp.1 - 11, 2000-09

14
The electron bounce resonance in a low-pressure solenoidal inductive discharge

Chung, CW; You, KI; Seo, SH; Kim, SS; Chang, Hong-Young, PHYSICS OF PLASMAS, v.8, no.6, pp.2992 - 2997, 2001-06

15
The finite size effect in a planar inductively coupled plasma

Chung, CW; Kim, SS; Seo, SH; Chang, Hong-Young; Yoon, NS, JOURNAL OF APPLIED PHYSICS, v.88, no.2, pp.1181 - 1183, 2000-07

16
Theoretical investigation of the evolution of electron energy distribution functions in inductively coupled discharges

Kim, SS; Chung, CW; Chang, Hong-Young, THIN SOLID FILMS, v.435, pp.72 - 77, 2003-07

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