Fabrication of Latch-Up-Free Self-Aligned Insulator Gate Bipolar Transistor(IGBT) with Silcide Contact Technology

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Publisher
대한전기학회
Issue Date
1989-09
Language
Korean
Citation

전기학회 논문지 P권, v.2, no.2, pp.127 - 131

ISSN
1229-800x
URI
http://hdl.handle.net/10203/61828
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