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Characterization of polysiloxane modified polysilsesquioxane films for low dielectric applications: Microstructure, electrical properties and mechanical properties

Lee, Jingyu Hyeon; Lyu, Yi Yeol; Mah, Sang Kook; Yim, JinHyeong; Jeong, HyunDam; Lee, Mong Sup; Kim, Sang Youl, Silicon Materials - Processing, Characterization and Reliability, v.716, pp.337 - 342, 2002-04-01

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