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Results 1-2 of 2 (Search time: 0.005 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Feedback Control of Cluster Tools for Regulating Wafer Delays

Kim, Chulhan; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1189 - 1199, 2016-04

2
Virtual control - A virtual cluster tool for testing and verifying a cluster tool controller and a scheduler

Joo, YJ; Lee, Tae-Eog, IEEE ROBOTICS & AUTOMATION MAGAZINE, v.11, no.3, pp.33 - 49, 2004-09

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