Virtual control - A virtual cluster tool for testing and verifying a cluster tool controller and a scheduler

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A Virtual Cluster Tool for Testing and Verifying a Cluster Tool Controller and a Scheduler.
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
2004-09
Language
English
Article Type
Article
Keywords

SYSTEMS; DESIGN

Citation

IEEE ROBOTICS & AUTOMATION MAGAZINE, v.11, no.3, pp.33 - 49

ISSN
1070-9932
URI
http://hdl.handle.net/10203/7389
Appears in Collection
IE-Journal Papers(저널논문)
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