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Results 1-2 of 2 (Search time: 0.002 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
A New Class of Sequences Without Interferences for Cluster Tools With Tight Wafer Delay Constraints

Lim, Yuchul; Yu, Tae Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.16, no.1, pp.392 - 405, 2019-01

2
Scheduling Dual-Armed Cluster Tools with Chamber Cleaning Operations

Yu, Tae Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.16, no.1, pp.218 - 228, 2019-01

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