Results 1-1 of 1 (Search time: 0.007 seconds).
NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
---|---|
Feedback Control of Cluster Tools: Stability Against Random Time Disruptions Kim, Chulhan; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.19, no.3, pp.2008 - 2015, 2022-07 |