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Results 1-10 of 10 (Search time: 0.006 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
An Efficient Mixed Integer Programming Model Based on Timed Petri Nets for Diverse Complex Cluster Tool Scheduling Problems

Jung, Chihyun; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.25, no.2, pp.186 - 199, 2012-05

2
Noncyclic Scheduling for Timed Discrete-Event Systems With Application to Single-Armed Cluster Tools Using Pareto-Optimal Optimization

Uno, Wikborg; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.10, no.3, pp.699 - 710, 2013-07

3
Modeling, Analysis, and Scheduling of Cluster Tools With Two Independent Arms

Tonke, Daniel; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1176 - 1188, 2016-04

4
Feedback Control of Cluster Tools for Regulating Wafer Delays

Kim, Chulhan; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1189 - 1199, 2016-04

5
Schedule Restoration for Single-Armed Cluster Tools

Kim, Ja-Hee; Zhou, MengChu; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.27, no.3, pp.388 - 399, 2014-08

6
Schedulability Analysis for Noncyclic Operation of Time-Constrained Cluster Tools With Time Variation

Kim, Hyunjung; Lee, Jun-Ho; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.3, pp.1409 - 1414, 2016-07

7
Scheduling Cluster Tools With Ready Time Constraints for Consecutive Small Lots

Kim, Hyun-Jung; Lee, Jun-Ho; Jung, Chi-Hyun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.10, no.1, pp.145 - 159, 2013-01

8
Wafer Delay Analysis and Workload Balancing of Parallel Chambers for Dual-Armed Cluster Tools With Multiple Wafer Types

Ko, Sung-Gil; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.18, no.3, pp.1516 - 1526, 2021-07

9
Adaptive Scheduling of Cluster Tools With Wafer Delay Constraints and Process Time Variation

Lim, Yuchul; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.17, no.1, pp.375 - 388, 2020-01

10
Feedback Control of Cluster Tools: Stability Against Random Time Disruptions

Kim, Chulhan; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.19, no.3, pp.2008 - 2015, 2022-07

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