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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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SECAM: A Supervisory Equipment Control Application Model for Integrated Semiconductor Manufacturing Equipment, Lee, JH; Lee, Tae-Eog, IEEE ROBOTICS & AUTOMATION MAGAZINE, v.11, no.1, pp.41 - 58, 2004-03 | |
Scheduling a wet station for wafer cleaning with multiple job flows and multiple wafer-handling robots Lee, Tae-Eog; Lee, HY; Lee, SJ, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.45, no.3, pp.487 - 507, 2007-02 | |
Virtual control - A virtual cluster tool for testing and verifying a cluster tool controller and a scheduler Joo, YJ; Lee, Tae-Eog, IEEE ROBOTICS & AUTOMATION MAGAZINE, v.11, no.3, pp.33 - 49, 2004-09 |
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