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Modeling and Simulation of Cluster Tools with Equipment Front-End Module Hong, Cheolhui; Seo, Jung-Heon; Lee, Tae-Eog, Winter Simulation Conference 2019, Informs, 2019-12-09 |
Modeling, Simulation and Supervisory Control of Semiconductor Manufacturing Cluster Tools with an Equipment Front-End Module Hong, Cheolhui; Lee, Tae-Eog, 16th IEEE International Conference on Automation Science and Engineering, CASE 2020, pp.703 - 709, IEEE Computer Society, 2020-08-20 |
Multi-agent Reinforcement Learning Approach for Scheduling Cluster Tools with Condition Based Chamber Cleaning Operations Hong, Cheolhui; Lee, Tae-Eog, 2018 17th IEEE International Conference on Machine Learning and Applications (ICMLA), pp.885 - 890, IEEE, 2018-12-19 |
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