Browse "CBE-Conference Papers(학술회의논문)" by Author Bae, S.H.
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| Performance of polishing slurries containing silica particles grown by sol-gel method Bae, S.H.; So, J.-H.; Yang, Seung-Man; Kim, D.H., Chemical-Mechanical Polishing 2000-Fundamentals and Materials Issues, v.613, pp.114 - 115, 2000-04-26 |
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