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College of Engineering(공과대학)Dept. of Chemical and Biomolecular Engineering(생명화학공학과)CBE-Conference Papers(학술회의논문)

Performance of polishing slurries containing silica particles grown by sol-gel method

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Bae, S.H. / So, J.-H. / Yang, Seung-Manresearcher / Kim, D.H.
Issue Date
2000-04-26
Language
ENG
Citation

Chemical-Mechanical Polishing 2000-Fundamentals and Materials Issues, v.613, pp.114 - 115

ISSN
0272-9172
URI
http://hdl.handle.net/10203/128441
Appears in Collection
CBE-Conference Papers(학술회의논문)
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