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College of Engineering(공과대학)Dept. of Chemical and Biomolecular Engineering(생명화학공학과)CBE-Conference Papers(학술회의논문)

Performance of polishing slurries containing silica particles grown by sol-gel method

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dc.contributor.authorBae, S.H.-
dc.contributor.authorSo, J.-H.-
dc.contributor.authorYang, Seung-Man-
dc.contributor.authorKim, D.H.-
dc.date.accessioned2013-03-16T06:35:17Z-
dc.date.available2013-03-16T06:35:17Z-
dc.date.created2012-02-06-
dc.date.issued2000-04-26-
dc.identifier.citationChemical-Mechanical Polishing 2000-Fundamentals and Materials Issues, v.613, no., pp.114 - 115-
dc.identifier.issn0272-9172-
dc.identifier.urihttp://hdl.handle.net/10203/128441-
dc.languageENG-
dc.titlePerformance of polishing slurries containing silica particles grown by sol-gel method-
dc.typeConference-
dc.identifier.scopusid2-s2.0-0034432901-
dc.type.rimsCONF-
dc.citation.volume613-
dc.citation.beginningpage114-
dc.citation.endingpage115-
dc.citation.publicationnameChemical-Mechanical Polishing 2000-Fundamentals and Materials Issues-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorYang, Seung-Man-
dc.contributor.nonIdAuthorBae, S.H.-
dc.contributor.nonIdAuthorSo, J.-H.-
dc.contributor.nonIdAuthorKim, D.H.-
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CBE-Conference Papers(학술회의논문)
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