Browse "CBE-Conference Papers(학술회의논문)" by Author Bae, SH
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| Performance of Polishing Slurries containing Silica Particles grown by Sol-Gel Method Bae, SH; So, JH; Yang, SM; Kim, DH, MATHEMATICAL METHODS IN ELECTROMAGNETIC THEORY, MMET, CONFERENCE PROCEEDINGS, v.613, pp.E6.5.1 - E6.5.6, 2000-09 |
| Wafer polishing performance of silica slurries with silica particles grown by sol-gel method Bae, SH; So, JH; Yang, Seung-Man; Kim, DH, Material Research Society 2000 Spring Meeting, 2000 |
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