Performance of Polishing Slurries containing Silica Particles grown by Sol-Gel Method

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Issue Date
2000-09
Language
ENG
Citation

MATHEMATICAL METHODS IN ELECTROMAGNETIC THEORY, MMET, CONFERENCE PROCEEDINGS, v.613, pp.E6.5.1 - E6.5.6

ISSN
0272-9172
URI
http://hdl.handle.net/10203/1085
Appears in Collection
CBE-Conference Papers(학술회의논문)
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