텅스텐 실리사이드 산화시 발생하는 이상산화 현상억제에 미치는 이온 주입효과Effect of Ion Implantation on the Suppression of Abnormal Oxide Grown over WSi2
- Publisher
- 한국진공학회
- Issue Date
- 1994-12
- Language
- Korean
- Citation
한국진공학회지, v.3, no.3, pp.322 - 330
- ISSN
- 1225-8822
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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