The Fabrication of the ZrO2 Thin Film by Chemical Vapor Deposition and the Effect of the Reaction Parameters on the Deposition Characteristics
- Publisher
- 한국요업학회
- Issue Date
- 1991
- Language
- Korean
- Citation
요업학회지, v.28, no.1, pp.1 - 10
- ISSN
- 1225-1372
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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