EFFECT OF DEPOSITION VARIABLES ON THE CHEMICAL VAPOR-DEPOSITION OF TIC USING PROPANE
- Publisher
- A V S AMER INST PHYSICS
- Issue Date
- 1986
- Language
- English
- Citation
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.4, no.2, pp.219 - 221
- ISSN
- 0734-2101
- Appears in Collection
- RIMS Journal Papers
- Files in This Item
- There are no files associated with this item.
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