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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Journal Papers(저널논문)

보론 나이트라이드를 사용하는 Predeposition공정에서 질소유량의 영향

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박형무 / 김충기
Publisher
대한전기학회
Issue Date
1981-04
Language
Korean
Citation

전기학회논문지, v.30, no.4, pp.45 - 48

ISSN
1975-8359
URI
http://hdl.handle.net/10203/55949
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