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A new inside-type segmented coil antenna for uniformity control in a large-area inductively coupled plasma Lee, Pyung-Woo; Kim, Sung-Sik; Seo, Sang-Hun; Chang, Choong-Seock; Chang, Hongyoung; Ichiki,Takanori; Horiike,Yasuhiro, JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.39, no.6A, pp.548 - 550, 2000-06 |
Method for measuring radical species distribution in plasma and an apparatus therefor Chang, Hongyoung; Lee, Pyung-Woo; Kim, Yong-Jin |
전자 싸이클로트론 공명 플라즈마 특성 및 중성종에 관한 연구 = Electron cyclotron resonance plasma characteristics and neutral density depletionlink 이평우; Lee, Pyung-Woo; et al, 한국과학기술원, 1997 |
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