실리콘 단결정 Substrate 에서 $Al_2O_3$ 화학증착층의 핵생성 및 결정 성장에 관한 연구A study of nucleation and crystal growth in the chemical vapor deposition of $Al_2O_3$ onto silicon single crystal
- Advisors
- 천성순researcher; Chun, Seong-Sunresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1983
- Identifier
- 63937/325007 / 000811282
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1983.2, [ [iii], 62 p. ]
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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