실리콘 단결정 Substrate 에서 $Al_2O_3$ 화학증착층의 핵생성 및 결정 성장에 관한 연구A study of nucleation and crystal growth in the chemical vapor deposition of $Al_2O_3$ onto silicon single crystal
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 천성순 | - |
| dc.contributor.advisor | Chun, Seong-Sun | - |
| dc.contributor.author | 최성우 | - |
| dc.contributor.author | Choi, Sung-Woo | - |
| dc.date.accessioned | 2011-12-15T01:51:57Z | - |
| dc.date.available | 2011-12-15T01:51:57Z | - |
| dc.date.issued | 1983 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=63937&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51945 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1983.2, [ [iii], 62 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | 실리콘 단결정 Substrate 에서 $Al_2O_3$ 화학증착층의 핵생성 및 결정 성장에 관한 연구 | - |
| dc.title.alternative | A study of nucleation and crystal growth in the chemical vapor deposition of $Al_2O_3$ onto silicon single crystal | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 63937/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000811282 | - |
| dc.contributor.localauthor | 천성순 | - |
| dc.contributor.localauthor | Chun, Seong-Sun | - |
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