ECR 플라즈마 화학 증착법에 의해 증착된 aluminum oxide 박막의 특성에 관한 연구A study on the properties of the aluminum oxide thin film deposited by ECR plasma CVD
- Advisors
- 이원종researcher; Lee, Won-Jongresearcher
- Description
- 한국과학기술원 : 전자재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1992
- Identifier
- 60427/325007 / 000901487
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1992.2, [ [iv], 59 p. ]
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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